Invention Grant
- Patent Title: Through-memory-level via structures for a three-dimensional memory device
-
Application No.: US15269017Application Date: 2016-09-19
-
Publication No.: US09818693B2Publication Date: 2017-11-14
- Inventor: Fumiaki Toyama , Hiroyuki Ogawa , Yoko Furihata , James Kai , Yuki Mizutani , Jixin Yu , Jin Liu , Johann Alsmeier
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Plano
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Plano
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L23/522 ; H01L21/768 ; H01L27/11524 ; H01L27/11556 ; H01L27/11529 ; H01L27/1157 ; H01L27/11582 ; H01L27/11573

Abstract:
A three dimensional NAND memory device includes word line driver devices located on or over a substrate, an alternating stack of word lines and insulating layers located over the word line driver devices, a plurality of memory stack structures extending through the alternating stack, each memory stack structure including a memory film and a vertical semiconductor channel, and through-memory-level via structures which electrically couple the word lines in a first memory block to the word line driver devices. The through-memory-level via structures extend through a through-memory-level via region located between a staircase region of the first memory block and a staircase region of another memory block.
Public/Granted literature
- US20170179026A1 THROUGH-MEMORY-LEVEL VIA STRUCTURES FOR A THREE-DIMENSIONAL MEMORY DEVICE Public/Granted day:2017-06-22
Information query
IPC分类: