Invention Grant
- Patent Title: Semiconductor memory device and method for manufacturing same
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Application No.: US15264086Application Date: 2016-09-13
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Publication No.: US09818754B2Publication Date: 2017-11-14
- Inventor: Yoshiaki Fukuzumi
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L27/11556 ; H01L27/11519

Abstract:
According to one embodiment, a semiconductor memory device includes a substrate, a stacked body, and a columnar portion. The stacked body includes a first insulating layer provided on the substrate, a first electrode layer provided on the first insulating layer and including polycrystalline silicon, a second insulating layer provided on the first electrode layer, and a second electrode layer provided on the second insulating layer. The columnar portion includes a semiconductor layer extending in a stacking direction of the stacked body and a memory layer provided between the semiconductor layer and the stacked body. The first and second electrode layers respectively have a first thickness and a second thickness in the stacking direction, and the first thickness of the first electrode layer is thicker than the second thickness of the second electrode layer.
Public/Granted literature
- US20170271347A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2017-09-21
Information query
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