Invention Grant
- Patent Title: Three-dimensional semiconductor device and manufacturing method thereof
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Application No.: US15093467Application Date: 2016-04-07
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Publication No.: US09818758B2Publication Date: 2017-11-14
- Inventor: Yeonghun Lee
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2015-0155278 20151105
- Main IPC: H01L23/535
- IPC: H01L23/535 ; H01L27/115 ; H01L27/11582 ; H01L21/768

Abstract:
There are provided a 3-D semiconductor device and a manufacturing method thereof. The 3-D semiconductor device includes a substrate extending along a first plane defined by first and second x and y directions, the substrate having a pipe transistor formed therein, a plurality of word lines spaced apart at regular intervals along a third direction z perpendicular to the first and second x and y directions; a first vertical plug connected to a first end of the pipe transistor by passing vertically through the word lines; a second vertical plug, connected to a second end of the pipe transistor by passing vertically through the word lines; a bit line connected to a top surface of the first vertical plug; and a source line connected to a top surface of the second vertical plug, wherein the first and second vertical plugs have different size.
Public/Granted literature
- US20170133397A1 THREE-DIMENSIONAL SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2017-05-11
Information query
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