Invention Grant
- Patent Title: Metal-insulator-metal capacitor over conductive layer
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Application No.: US13764811Application Date: 2013-02-12
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Publication No.: US09818817B2Publication Date: 2017-11-14
- Inventor: John J. Zhu , P R Chidambaram , Giridhar Nallapati , Choh fei Yeap
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM Incorporated
- Current Assignee: QUALCOMM Incorporated
- Current Assignee Address: US CA San Diego
- Agency: Qualcomm Incorporated/Seyfarth
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01L23/522

Abstract:
A method of fabricating a metal-insulator-metal (MIM) capacitor reduces the number of masks and processing steps compared to conventional techniques. A conductive redistribution layer (RDL) is patterned on a semiconductor chip. A MIM dielectric layer is deposited over the RDL. A first conductive layer of a MIM capacitor is deposited over the MIM dielectric layer. The MIM dielectric layer is patterned using a MIM conductive layer mask. The conductive redistribution layer includes two RDL nodes that extend under the first conductive layer of the MIM capacitor. A conductive via or bump extends through the MIM dielectric layer and couples one of the RDL nodes to the first conductive layer of the MIM capacitor.
Public/Granted literature
- US20140225223A1 METAL-INSULATOR-METAL CAPACITOR OVER CONDUCTIVE LAYER Public/Granted day:2014-08-14
Information query
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