Invention Grant
- Patent Title: Vibration element, method for manufacturing same, and vibration-type driving device
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Application No.: US14174699Application Date: 2014-02-06
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Publication No.: US09818927B2Publication Date: 2017-11-14
- Inventor: Yutaka Maruyama
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2013-023657 20130208
- Main IPC: H01L41/08
- IPC: H01L41/08 ; H01L41/09 ; H01L41/314 ; H02N2/00 ; H02N2/02 ; H02N2/10

Abstract:
A vibration element includes: a substrate; a ceramic layer containing molten glass and provided on the substrate; and a piezoelectric element fixed to the substrate with the ceramic layer therebetween, wherein the piezoelectric element includes a first electrode layer provided in contact with the ceramic layer, a second electrode layer, and a piezoelectric layer provided between the first electrode layer and the second electrode layer, and the first electrode layer has a thickness larger than that of the second electrode layer.
Public/Granted literature
- US20140225478A1 VIBRATION ELEMENT, METHOD FOR MANUFACTURING SAME, AND VIBRATION-TYPE DRIVING DEVICE Public/Granted day:2014-08-14
Information query
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