Invention Grant
- Patent Title: Mesh in mesh backplate for micromechanical microphone
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Application No.: US14894388Application Date: 2014-05-29
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Publication No.: US09820059B2Publication Date: 2017-11-14
- Inventor: John W. Zinn , Brett Matthew Diamond
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Michael Best & Friedrich LLP
- International Application: PCT/US2014/039981 WO 20140529
- International Announcement: WO2014/194062 WO 20141204
- Main IPC: H04R19/04
- IPC: H04R19/04 ; H04R19/00
Abstract:
A MEMS backplate. The MEMS backplate includes a first mesh pattern having a first height and a first arrangement of openings, and a second mesh pattern having a second height and a second arrangement of vent hole apertures. The second mesh pattern is contained within the opening formed by the first mesh pattern.
Public/Granted literature
- US20160112809A1 MESH IN MESH BACKPLATE FOR MICROMECHANICAL MICROPHONE Public/Granted day:2016-04-21
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