Invention Grant
- Patent Title: Segmented antenna assembly
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Application No.: US14371412Application Date: 2013-01-11
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Publication No.: US09820372B2Publication Date: 2017-11-14
- Inventor: Benjamin M. Johnston
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- International Application: PCT/US2013/021246 WO 20130111
- International Announcement: WO2013/112302 WO 20130801
- Main IPC: H05B37/02
- IPC: H05B37/02 ; H05H1/46 ; C23C16/511 ; H01J37/32

Abstract:
A segmented antenna assembly for use in a plasma enhanced chemical vapor deposition (PECVD) apparatus. One embodiment provides an apparatus comprising a chamber body having a top surface and a bottom surface, an antenna comprising a first segment, a second segment electrically coupled to the first segment and extending through an interior volume of the chamber, and a third segment electrically coupled to the second segment, and a dielectric layer disposed around an outer diameter of the second segment.
Public/Granted literature
- US20150173166A1 SEGMENTED ANTENNA ASSEMBLY Public/Granted day:2015-06-18
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