Invention Grant
- Patent Title: Plasma stabilization method and plasma apparatus
-
Application No.: US14192230Application Date: 2014-02-27
-
Publication No.: US09824863B2Publication Date: 2017-11-21
- Inventor: Takumasa Nishida , Shu Nakajima
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: H01L21/306
- IPC: H01L21/306 ; C23C16/00 ; H01J37/32

Abstract:
A plasma technique in which a plasma generation technique frequently used in various fields including a semiconductor manufacturing process is used, and generation of plasma instability (high-speed impedance change of plasma) can efficiently be suppressed and controlled in order to manufacture stable products. An apparatus includes a processing chamber, a surrounding member disposed so as to surround the processing chamber, an RF induction coil disposed above the top surface, a direct-current magnetic field generator for supplying a direct-current magnetic field to the inner space, and an RF cut filter connected to a direct current (DC) power supply and connected to the direct-current magnetic field generator. The RF cut filter includes a first capacitor connected to a positive terminal of the DC power supply and to ground, and a second capacitor connected to a negative terminal of the DC power supply and to ground.
Public/Granted literature
- US20140174663A1 PLASMA STABILIZATION METHOD AND PLASMA APPARATUS Public/Granted day:2014-06-26
Information query
IPC分类: