Invention Grant
- Patent Title: Semiconductor manufacturing device and semiconductor manufacturing method
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Application No.: US14482489Application Date: 2014-09-10
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Publication No.: US09824905B2Publication Date: 2017-11-21
- Inventor: Katsunori Shibuya , Takashi Imoto , Soichi Homma , Takeshi Watanabe , Yuusuke Takano
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2013-257774 20131213
- Main IPC: G01R31/10
- IPC: G01R31/10 ; H01L21/67 ; C23C14/54 ; H01L23/552 ; C23C14/56

Abstract:
A semiconductor manufacturing device has an upper cover configured to be arranged above top surface of unshielded semiconductor device which are mounted on a tray placed on a carrier to go through electromagnetic shielding, and a displacement detector configured to detect an abnormality when the upper cover is raised by at least one of the semiconductor device which is brought into contact with a bottom surface of the upper cover.
Public/Granted literature
- US20150167157A1 SEMICONDUCTOR MANUFACTURING DEVICE AND SEMICONDUCTOR MANUFACTURING METHOD Public/Granted day:2015-06-18
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