Invention Grant
- Patent Title: Image sensor and method for fabricating the same
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Application No.: US15236246Application Date: 2016-08-12
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Publication No.: US09825075B2Publication Date: 2017-11-21
- Inventor: Sung-Kun Park
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2016-0034103 20160322
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A method for fabricating an image sensor in accordance with an embodiment of the inventive concepts may include forming first and second photodiodes within a substrate, forming first and second gate electrodes over the substrate, the first gate electrode vertically partially overlapping the first photodiode and the second gate electrode vertically partially overlapping the second photodiode, forming an impurity injection region comprising first and second type impurities between the first and the second gate electrodes, and performing an annealing process to form a floating diffusion region comprising the first type impurities and a channel region comprising the second type impurities. The channel region surrounds lateral surfaces and a bottom surface of the floating diffusion region.
Public/Granted literature
- US20170278882A1 IMAGE SENSOR AND METHOD FOR FABRICATING THE SAME Public/Granted day:2017-09-28
Information query
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