Invention Grant
- Patent Title: Semiconductor devices and methods for manufacturing the same
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Application No.: US15424642Application Date: 2017-02-03
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Publication No.: US09825135B2Publication Date: 2017-11-21
- Inventor: Huilong Zhu
- Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Applicant Address: CN Beijing
- Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee Address: CN Beijing
- Agency: Christensen, Fonder, Dardi & Herbert
- Priority: CN201310351422 20130813
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L29/66 ; H01L21/768

Abstract:
Semiconductor devices and methods for manufacturing the same are provided. An example method may include: forming a sacrificial gate stack on a substrate; forming a gate spacer on sidewalls of the sacrificial gate stack; forming an interlayer dielectric layer on the substrate and planarizing it to expose the sacrificial gate stack; partially etching back the sacrificial gate stack to form an opening; expanding the resultant opening so that the opening is in a shape whose size gradually increases from a side adjacent to the substrate towards an opposite side away from the substrate; and removing a remaining portion of the sacrificial gate stack and forming a gate stack in a space defined by the gate spacer.
Public/Granted literature
- US20170148881A1 SEMICONDUCTOR DEVICES AND METHODS FOR MANUFACTURING THE SAME Public/Granted day:2017-05-25
Information query
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