Invention Grant
- Patent Title: Thin-film transistor and method for manufacturing same
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Application No.: US15248567Application Date: 2016-08-26
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Publication No.: US09825180B2Publication Date: 2017-11-21
- Inventor: Toshihide Nabatame , Kazuhito Tsukagoshi , Shinya Aikawa , Toyohiro Chikyo
- Applicant: National Institute for Materials Science
- Applicant Address: JP Ibaraki
- Assignee: National Institute for Materials Science
- Current Assignee: National Institute for Materials Science
- Current Assignee Address: JP Ibaraki
- Agency: Morgan, Lewis & Bockius LLP
- Priority: JP2013-099284 20130509; JP2013-139425 20130703; JP2014-016266 20140131
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/786 ; H01L29/66 ; H01L21/02 ; H01L21/40 ; H01L29/423 ; H01L29/49 ; H01L29/51

Abstract:
The present invention provides a thin-film transistor in which transistor characteristics such as drain current and threshold voltage are improved, and a method of manufacturing the same. The present invention provides a thin-film transistor provided with a source electrode (108), a drain electrode (109), a semiconductor layer (105), a gate electrode (103), and an insulating layer (104); wherein the semiconductor layer (105) contains a composite metal oxide obtained by adding to a first metal oxide an oxide having an oxygen dissociation energy that is at least 200 kJ/mol greater than the oxygen dissociation energy of the first metal oxide, whereby the amount of oxygen vacancy is controlled; and the insulating layer (104) is provided with an SiO2 layer, a high-permittivity first layer, and a high-permittivity second layer, whereby the dipoles generated at the boundary between the SiO2 layer and the high-permittivity layers are used to control the threshold voltage.
Public/Granted literature
- US20160365455A1 Thin-Film Transistor and Method for Manufacturing Same Public/Granted day:2016-12-15
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