Invention Grant
- Patent Title: Polyimides as laser release materials for 3-D IC applications
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Application No.: US14805898Application Date: 2015-07-22
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Publication No.: US09827740B2Publication Date: 2017-11-28
- Inventor: Xiao Liu , Dongshun Bai , Tony D. Flaim , Xing-Fu Zhong , Qi Wu
- Applicant: Brewer Science Inc.
- Applicant Address: US MO Rolla
- Assignee: Brewer Science Inc.
- Current Assignee: Brewer Science Inc.
- Current Assignee Address: US MO Rolla
- Agency: Hovey Williams LLP
- Main IPC: B32B38/10
- IPC: B32B38/10 ; B32B7/06 ; B05D3/00 ; B32B27/06 ; B32B37/14 ; C09D179/08 ; H01L21/683 ; C08G73/10

Abstract:
The invention broadly relates to release layer compositions that enable thin wafer handling during microelectronics manufacturing. Preferred release layers are formed from compositions comprising a polyamic acid or polyimide dissolved or dispersed in a solvent system, followed by curing and/or solvent removal at about 250° C. to about 350° C. for less than about 10 minutes, yielding a thin film. This process forms the release compositions into polyimide release layers that can be used in temporary bonding processes, and laser debonded after the desired processing has been carried out.
Public/Granted literature
- US20160023436A1 POLYIMIDES AS LASER RELEASE MATERIALS FOR 3-D IC APPLICATIONS Public/Granted day:2016-01-28
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