Invention Grant
- Patent Title: Thermal history-based etching
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Application No.: US14229385Application Date: 2014-03-28
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Publication No.: US09828284B2Publication Date: 2017-11-28
- Inventor: John T. Simpson
- Applicant: UT-BATTELLE, LLC
- Applicant Address: US TN Oak Ridge
- Assignee: UT-BATTELLE, LLC
- Current Assignee: UT-BATTELLE, LLC
- Current Assignee Address: US TN Oak Ridge
- Agency: Fox Rothschild LLP
- Main IPC: B44C1/22
- IPC: B44C1/22 ; C03C15/00 ; C03C25/68 ; C03B37/012 ; C03B37/025 ; C03B37/028 ; C03B37/075 ; C03B37/16 ; G02B1/18 ; C03C3/089 ; C03C13/04

Abstract:
A method for adjusting an etchability of a first borosilicate glass by heating the first borosilicate glass; combining the first borosilicate glass with a second borosilicate glass to form a composite; and etching the composite with an etchant. A material having a protrusive phase and a recessive phase, where the protrusive phase protrudes from the recessive phase to form a plurality of nanoscale surface features, and where the protrusive phase and the recessive phase have the same composition.
Public/Granted literature
- US20150274582A1 THERMAL HISTORY-BASED ETCHING Public/Granted day:2015-10-01
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