Invention Grant
- Patent Title: Nonvolatile memory device and method for fabricating the same
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Application No.: US15057663Application Date: 2016-03-01
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Publication No.: US09831264B2Publication Date: 2017-11-28
- Inventor: Eun-Seok Choi , Sa-Yong Shim , In-Hey Lee , Sung-Wook Jung , Jung-Seok Oh
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2013-0038635 20130409
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L27/11582 ; H01L27/11565 ; H01L29/66 ; H01L29/792 ; H01L21/311 ; H01L21/3213 ; H01L21/768

Abstract:
A nonvolatile memory device includes a substrate comprising a first word line formation area, a second word line formation area, and a support area interposed between the first and second word line formation areas; a first stacked structure disposed over the substrate of each of the first and second word line formation areas and having a plurality of interlayer dielectric layers and a plurality of conductive layers that are alternately stacked therein; a second stacked structure disposed over the substrate of the support area and having the plurality of interlayer dielectric layers and a plurality of spaces that are alternately stacked therein; a channel layer disposed in the first stacked structure; and a memory layer interposed between the channel layer and each of the plurality of conductive layers.
Public/Granted literature
- US20160181275A1 NONVOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2016-06-23
Information query
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