Invention Grant
- Patent Title: Heterojunction-based HEMT transistor
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Application No.: US15028671Application Date: 2014-10-10
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Publication No.: US09831331B2Publication Date: 2017-11-28
- Inventor: Frédéric Morancho , Saleem Hamady , Bilal Beydoun
- Applicant: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE—CNRS— , UNIVERSITE LIBANAISE
- Applicant Address: FR Paris LB Beirut
- Assignee: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE—CNRS,UNIVERSITE LIBANAISE
- Current Assignee: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE—CNRS,UNIVERSITE LIBANAISE
- Current Assignee Address: FR Paris LB Beirut
- Agency: Volpe and Koenig, P.C.
- Priority: FR1359925 20131011
- International Application: PCT/FR2014/052587 WO 20141010
- International Announcement: WO2015/052456 WO 20150416
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/338 ; H01L29/778 ; H01L29/10 ; H01L29/20

Abstract:
A heterojunction structure of semiconductor material, for a high electron mobility transistor includes a substrate, a buffer layer, arranged on the substrate, of a large bandgap semiconductor material, based on a nitride from column III, where the buffer layer is not intentionally doped with n-type carriers, a barrier layer arranged above the buffer layer, of a large bandgap semiconductor material based on a nitride from column III, where the width of the bandgap of the barrier layer is less than the width of the bandgap of the buffer layer. The heterojunction structure additionally comprises an intentionally doped area, of a material based on a nitride from column III identical to the material of the buffer layer, in a plane parallel to the plane of the substrate and a predefined thickness along a direction orthogonal to the plane of the substrate, where the area is comprised in the buffer layer.
Public/Granted literature
- US20160254377A1 HETEROJUNCTION-BASED HEMT TRANSISTOR Public/Granted day:2016-09-01
Information query
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