Invention Grant
- Patent Title: Split-gate flash memory having mirror structure and method for forming the same
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Application No.: US14968108Application Date: 2015-12-14
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Publication No.: US09831354B2Publication Date: 2017-11-28
- Inventor: Binghan Li
- Applicant: Shanghai Huahong Grace Semiconductor Manufacturing Corporation
- Applicant Address: CN Shanghai
- Assignee: Shanghai Huahong Grace Semiconductor Manufacturing Corporation
- Current Assignee: Shanghai Huahong Grace Semiconductor Manufacturing Corporation
- Current Assignee Address: CN Shanghai
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: CN201410855027 20141230
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/788 ; H01L29/66 ; H01L21/28 ; H01L29/423

Abstract:
Split-gate flash memory and forming method thereof are provided. The method includes: forming a first dielectric layer on a semiconductor substrate; forming a floating gate layer on the first dielectric layer; forming a mask layer on the floating gate layer; etching the mask layer until first groove exposing the floating gate layer is formed; forming a protective sidewall on sidewall of the first groove; forming a gate dielectric layer on bottom and the sidewall of the first groove; forming two control gates on the gate dielectric layer, the remained first groove serving as second groove; etching the gate dielectric layer and the floating gate layer at bottom of the second groove until third groove exposing the first dielectric layer is formed; forming a source in the semiconductor substrate under the third groove; and forming a second dielectric layer in the third groove. Reliability and durability of the memory are improved.
Public/Granted literature
- US20160190335A1 Split-Gate Flash Memory Having Mirror Structure and Method for Forming the Same Public/Granted day:2016-06-30
Information query
IPC分类: