Invention Grant
- Patent Title: Process for producing hollow silicon bodies
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Application No.: US14950787Application Date: 2015-11-24
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Publication No.: US09831364B2Publication Date: 2017-11-28
- Inventor: Juergen Erwin Lang , Hartwig Rauleder , Julia Lyubina , Janaina Marinas Pérez
- Applicant: Juergen Erwin Lang , Hartwig Rauleder , Julia Lyubina , Janaina Marinas Pérez
- Applicant Address: DE Essen
- Assignee: Evonik Degussa GmbH
- Current Assignee: Evonik Degussa GmbH
- Current Assignee Address: DE Essen
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: EP14195300 20141128
- Main IPC: H01L31/0352
- IPC: H01L31/0352 ; H01M4/38 ; C01B33/029 ; H01L31/028 ; C01B33/027 ; C01B33/03

Abstract:
Hollow bodies having a silicon-comprising shell, are produced by, in a gas comprising at least one silane of the general formula SinH2n+2−mXm with n=1 to 4, m=0 to 2n+2 and X=halogen, (a) generating a non-thermal plasma by an AC voltage of frequency f, or operating a light arc, or introducing electromagnetic energy in the infrared region into the gas, giving a resulting phase which (b) is dispersed in a wetting agent and distilled, and then (c) the distillate is contacted at least once with a mixture of at least two of the substances hydrofluoric acid, nitric acid, water, giving a solid residue comprising hollow bodies having a silicon-comprising shell after the conversion reaction of the distillate with the mixture has abated or ended.
Public/Granted literature
- US20160155871A1 PROCESS FOR PRODUCING HOLLOW SILICON BODIES Public/Granted day:2016-06-02
Information query
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