Invention Grant
- Patent Title: Evaporation system and fabricating method and evaporation method thereof
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Application No.: US15098470Application Date: 2016-04-14
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Publication No.: US09831430B2Publication Date: 2017-11-28
- Inventor: Wenbin Jia , Rui Peng , Xinwei Gao , Guangcai Yuan
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Armstrong Teasdale LLP
- Priority: CN201510624848 20150925
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L51/56
Abstract:
An evaporation source is provided. The evaporation source includes a substrate, a plurality of recesses spaced from each other and arranged on the substrate, and a plurality of heating sources arranged within the plurality of recesses.
Public/Granted literature
- US20170092860A1 EVAPORATION SOURCE AND FABRICATING METHOD AND EVAPORATION METHOD THEREOF Public/Granted day:2017-03-30
Information query
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