Invention Grant
- Patent Title: Membrane-based NANO-electromechanical systems device and methods to make and use same
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Application No.: US14587259Application Date: 2014-12-31
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Publication No.: US09831804B2Publication Date: 2017-11-28
- Inventor: Joseph F Pinkerton , David A Badger , William Neil Everett , William Martin Lackowski
- Applicant: Clean Energy Labs, LLC
- Applicant Address: US TX Austin
- Assignee: Clean Energy Labs, LLC
- Current Assignee: Clean Energy Labs, LLC
- Current Assignee Address: US TX Austin
- Agency: Dickinson Wright PLLC
- Agent Ross Spencer Garsson
- Main IPC: G01N22/00
- IPC: G01N22/00 ; H02N1/08 ; B81B3/00 ; G02B7/182 ; H01G5/16 ; H01H59/00 ; B82Y20/00
Abstract:
Nano-electromechanical systems (NEMS) devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The membrane-based NEMS devices can be used as sensors, electrical relays, adjustable angle mirror devices, variable impedance devices, and devices performing other functions.
Public/Granted literature
- US20150115767A1 Membrane-Based Nano-Electromechanical Systems Device And Methods To Make And Use Same Public/Granted day:2015-04-30
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