Invention Grant
- Patent Title: Polishing apparatus and retainer ring configuration
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Application No.: US14710535Application Date: 2015-05-12
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Publication No.: US09833875B2Publication Date: 2017-12-05
- Inventor: Osamu Nabeya
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Baker & Hostetler LLP
- Priority: JP2014-100381 20140514; JP2014-100382 20140514
- Main IPC: B24B37/32
- IPC: B24B37/32 ; B24B37/10 ; B24B41/00 ; B24B37/30

Abstract:
A polishing apparatus capable of preventing wear of rollers which are to transmit a load to a retainer ring and capable of preventing wear particles from escaping outside is disclosed. The polishing apparatus includes: a retainer ring disposed so as to surround the substrate and configured to press the polishing surface while rotating together with a head body; a rotary ring secured to the retainer ring and configured to rotate together with the retainer ring; a stationary ring disposed on the rotary ring; and a local-load exerting device configured to apply a local load to a part of the retainer ring through the rotary ring and the stationary ring. The rotary ring has rollers which are in contact with the stationary ring.
Public/Granted literature
- US20150328743A1 POLISHING APPARATUS Public/Granted day:2015-11-19
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