Invention Grant
- Patent Title: Microelectromechanical and/or nanoelectromechanical structure with a variable quality factor
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Application No.: US14260539Application Date: 2014-04-24
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Publication No.: US09834432B2Publication Date: 2017-12-05
- Inventor: Yannick Deimerly , Guillaume Jourdan , Patrice Rey
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALT
- Applicant Address: FR Paris
- Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1353789 20130425
- Main IPC: B81B7/00
- IPC: B81B7/00 ; G01P15/08 ; G01C19/5726

Abstract:
Inertial sensor comprising a fixed part and at least one mass suspended from the fixed part and means of damping the displacement of the part suspended from the fixed part, said damping means being electromechanical damping means comprising at least one DC power supply source, one electrical resistor and one variable capacitor in series, said variable capacitor being formed partly by the suspended part and partly by the fixed part such that displacement of the suspended part causes a variation of the capacitance of the variable capacitor.
Public/Granted literature
- US20140318906A1 MICROELECTROMECHANICAL AND/OR NANOELECTROMECHANICAL STRUCTURE WITH A VARIABLE QUALITY FACTOR Public/Granted day:2014-10-30
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