Invention Grant
- Patent Title: Capacitive transducer and method of manufacturing the same
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Application No.: US14524170Application Date: 2014-10-27
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Publication No.: US09834434B2Publication Date: 2017-12-05
- Inventor: Kazuhiko Kato
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2013-239401 20131119
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B06B1/02 ; B81B3/00 ; B81C1/00

Abstract:
Provided are a capacitive transducer that can make a sealing film thickness necessary to seal a gap smaller and can enhance performance such as a wider bandwidth, and a method of manufacturing the capacitive transducer. The capacitive transducer including cells each including a vibration film including a second electrode that is provided with a gap from a first electrode can be manufactured in the following manufacturing method. A convex part is formed on the first electrode, a sacrifice layer having a thickness larger than the thickness of the convex part is formed on the first electrode and the convex part, and a membrane is formed on the sacrifice layer. Further, an etching hole is formed in the membrane at a position above the convex part, the sacrifice layer is etched through the etching hole, and the etching hole is sealed by a sealing layer.
Public/Granted literature
- US20150135841A1 CAPACITIVE TRANSDUCER AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2015-05-21
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