Invention Grant
- Patent Title: Polishing composition
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Application No.: US14359248Application Date: 2012-11-21
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Publication No.: US09834703B2Publication Date: 2017-12-05
- Inventor: Shuugo Yokota , Yasuyuki Yamato , Satoru Yarita , Tomohiko Akatsuka
- Applicant: FUJIMI INCORPORATED
- Applicant Address: JP Kiyosu-Shi
- Assignee: FUJIMI INCORPORATED
- Current Assignee: FUJIMI INCORPORATED
- Current Assignee Address: JP Kiyosu-Shi
- Agency: Foley & Lardner LLP
- Priority: JP2011-258346 20111125
- International Application: PCT/JP2012/080222 WO 20121121
- International Announcement: WO2013/077372 WO 20130530
- Main IPC: C09G1/02
- IPC: C09G1/02 ; B24B37/04 ; H01L21/306 ; C09K3/14 ; H01L29/20

Abstract:
A polishing composition of the present invention is to be used for polishing an object including a portion containing a group III-V compound material. The polishing composition contains abrasive grains, an oxidizing agent, and a water-soluble polymer. When the polishing composition is left to stand for one day in an environment with a temperature of 25° C., the water-soluble polymer may be adsorbed on the abrasive grains at 5,000 or more molecules per 1 μm2 of the surface area of the abrasive grains. Alternatively, the water-soluble polymer may be a compound that reduces the water contact angle of the portion containing a group III-V compound material of the object after being polished with the polishing composition.
Public/Granted literature
- US20140342561A1 POLISHING COMPOSITION Public/Granted day:2014-11-20
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