Invention Grant
- Patent Title: Nanowire cluster and template and method for nanowire cluster formation
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Application No.: US14814362Application Date: 2015-07-30
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Publication No.: US09834847B2Publication Date: 2017-12-05
- Inventor: Cedric Huyghebaert , Alaa Abd-Elnaiem , Philippe Vereecken
- Applicant: IMEC VZW , King Abdulaziz City for Science and Technology
- Applicant Address: BE Leuven SA Riyadh
- Assignee: IMEC VZW,King Abdulaziz City of Science and Technology
- Current Assignee: IMEC VZW,King Abdulaziz City of Science and Technology
- Current Assignee Address: BE Leuven SA Riyadh
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP14179382 20140731
- Main IPC: C25D1/20
- IPC: C25D1/20 ; C25D1/00 ; B82Y10/00 ; B82Y40/00 ; H01L29/66 ; H01L29/06 ; H01L29/10 ; H01L29/41 ; C25D11/04 ; H01B1/02 ; H01B5/00 ; H01M4/66 ; H01M4/70 ; H01M4/131 ; H01M10/052 ; H01M4/02 ; C25D3/12 ; C25D11/24 ; C25D11/00
Abstract:
A cluster of non-collapsed nanowires, a template to produce the same, methods to obtain the template and to obtain the cluster by using the template, and devices having the cluster. The cluster and the template both have an interconnected region and an interconnection-free region.
Public/Granted literature
- US20160032475A1 Method for Nanowire Cluster Formation Public/Granted day:2016-02-04
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