Invention Grant
- Patent Title: Method for producing group III nitride crystal, group III nitride crystal, and semiconductor device
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Application No.: US14371607Application Date: 2013-01-10
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Publication No.: US09834859B2Publication Date: 2017-12-05
- Inventor: Yusuke Mori , Mamoru Imade , Masashi Yoshimura , Mihoko Hirao , Masayuki Imanishi
- Applicant: OSAKA UNIVERSITY
- Applicant Address: JP Osaka
- Assignee: OSAKA UNIVERSITY
- Current Assignee: OSAKA UNIVERSITY
- Current Assignee Address: JP Osaka
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: JP2012-003637 20120111
- International Application: PCT/JP2013/050342 WO 20130110
- International Announcement: WO2013/105618 WO 20130718
- Main IPC: C30B19/02
- IPC: C30B19/02 ; C30B19/12 ; H01L21/02 ; C30B29/40 ; H01L29/20 ; H01L33/00

Abstract:
The present invention provides a method for producing a Group III nitride crystal, capable of producing a Group III nitride crystal in a large size with few defects and high quality. The method is a method for producing a Group III nitride crystal (13), including: a seed crystal selection step of selecting plural parts of a Group III nitride crystal layer (11) as seed crystals for generation and growth of Group III nitride crystals (13); a contact step of causing the surfaces of the seed crystals to be in contact with an alkali metal melt; a crystal growth step of causing a Group III element and nitrogen to react with each other under a nitrogen-containing atmosphere in the alkali metal melt to generate and grow the Group III nitride crystals (13), wherein the seed crystals are hexagonal crystals, in the seed crystal selection step, the seed crystals are arranged so that m-planes of the respective crystals grown from the seed crystals that are adjacent to each other do not substantially coincide with each other, and in the crystal growth step, the plural Group III nitride crystals (13) grown from the plural seed crystals by the growth of the Group III nitride crystals (13) are bound.
Public/Granted literature
- US20140328742A1 METHOD FOR PRODUCING GROUP III NITRIDE CRYSTAL, GROUP III NITRIDE CRYSTAL, AND SEMICONDUCTOR DEVICE Public/Granted day:2014-11-06
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