Invention Grant
- Patent Title: Vacuum pump with fiber-reinforced resin cylinder
-
Application No.: US14358248Application Date: 2012-11-28
-
Publication No.: US09835170B2Publication Date: 2017-12-05
- Inventor: Takashi Kabasawa , Yuichi Kawai , Masaki Hori , Takahiro Iiyoshi
- Applicant: EDWARDS JAPAN LIMITED , ARISAWA MFG. CO., LTD.
- Applicant Address: JP Yachiyo-shi, Chiba JP Joetsu-shi, Niigata
- Assignee: EDWARDS JAPAN LIMITED,ARISAWA MFG. CO., LTD.
- Current Assignee: EDWARDS JAPAN LIMITED,ARISAWA MFG. CO., LTD.
- Current Assignee Address: JP Yachiyo-shi, Chiba JP Joetsu-shi, Niigata
- Agency: Sughrue Mion, PLLC
- Priority: JP2011-261793 20111130
- International Application: PCT/JP2012/080775 WO 20121128
- International Announcement: WO2013/081019 WO 20130606
- Main IPC: F04D29/52
- IPC: F04D29/52 ; F04D19/04 ; F04D29/02

Abstract:
Provided is a vacuum pump in which the flexing of a rotating cylinder made of a fiber-reinforced resin can be reduced as much as possible to sufficiently reduce the gap between the rotating cylinder and a fixed cylinder, and exhaust performance can thereby be improved to great effect. A vacuum pump comprising a thread groove pump portion equipped with a fixed cylinder portion (2) having a spiraling thread groove portion (1) provided in an internal peripheral surface, and a rotating cylinder portion (3) placed inside the fixed cylinder portion (2), the thread groove pump portion exhausting through a spiraling exhaust flow channel due to the rotating cylinder portion (3) being caused to rotate, and the exhaust flow channel being formed from the thread groove portion (1) and an external peripheral surface of the rotating cylinder portion (3). The rotating cylinder portion (3) is configured by stacking a plurality of fiber-reinforced resin layers, and the outermost fiber-reinforced resin layer is thicker than the adjacent layer.
Public/Granted literature
- US20140294565A1 VACUUM PUMP Public/Granted day:2014-10-02
Information query