Invention Grant
- Patent Title: Optical cantilever based analysis
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Application No.: US14473807Application Date: 2014-08-29
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Publication No.: US09835591B2Publication Date: 2017-12-05
- Inventor: John Marcel Dell , Mariusz Martyniuk , Adrian John Keating , Gino Michael Putrino , Lorenzo Faraone , Dilusha Silva , Roger Jeffery
- Applicant: University of Western Australia
- Applicant Address: AU Melbourne, Victoria
- Assignee: PANORAMA SYNERGY LTD
- Current Assignee: PANORAMA SYNERGY LTD
- Current Assignee Address: AU Melbourne, Victoria
- Agency: Howard & Howard Attorneys PLLC
- Priority: AU2012900444 20120207
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01N29/02 ; G01N21/77 ; G01N29/036 ; G01N29/24 ; G02B26/08 ; G01Q20/02 ; B82Y20/00
Abstract:
An optical sensor including a MEMS structure, and a grating coupled resonating structure positioned adjacent to the MEMS structure, the grating coupled resonating structure comprising an interrogating grating coupler configured to direct light towards the MEMS structure. The interrogating grating coupler is two dimensional, and the interrogating grating coupler and the MEMS structure form an optical resonant cavity.
Public/Granted literature
- US20140368829A1 OPTICAL CANTILEVER BASED ANALYSIS Public/Granted day:2014-12-18
Information query
