Invention Grant
- Patent Title: Angular velocity detection device and angular velocity sensor including the same
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Application No.: US14676330Application Date: 2015-04-01
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Publication No.: US09835641B2Publication Date: 2017-12-05
- Inventor: Kensaku Yamamoto
- Applicant: Panasonic Intellectual Property Management Co., Ltd.
- Applicant Address: JP Osaka
- Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: Pearne & Gordon LLP
- Priority: JP2010-144642 20100625; JP2010-144643 20100625; JP2010-248078 20101105; JP2010-248079 20101105; JP2011-025738 20110209
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01P3/02 ; G01C19/5719 ; G01C19/5733 ; G01P15/12 ; G01P15/125 ; G01P15/18 ; G01P15/08

Abstract:
An angular velocity detection device includes an outer frame including fixed portions, outer beam portions connected to the fixed portions, a sensing part surrounded by the outer frame with first slit therebetween, and a joint connecting the outer frame and the sensing part. The sensing part includes an inner beam portion, a flexible portion, and a detector. The inner beam portion has a hollow region inside and is square-shaped when viewed from above. The flexible portion is formed in the hollow region of the inner beam portion, and is connected to the inner edge of the inner beam portion. The detector is disposed in the flexible portion. The first slit is formed to surround the sensing part excluding the joint.
Public/Granted literature
- US20150204897A1 ANGULAR VELOCITY DETECTION DEVICE AND ANGULAR VELOCITY SENSOR INCLUDING THE SAME Public/Granted day:2015-07-23
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