Wire grid polarizer and method of fabricating the same
Abstract:
Provided is a wire grid polarizer comprising a substrate, a plurality of conductive wire patterns formed in parallel to protrude from a top surface of the substrate and first hard mask patterns disposed on the conductive wire patterns and second hard mask patterns disposed on the first hard mask patterns, wherein a ratio of a taper angle of the second hard mask patterns to a taper angle of the first hard mask pattern is 1 or greater.
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