Invention Grant
- Patent Title: Wire grid polarizer and method of fabricating the same
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Application No.: US14877736Application Date: 2015-10-07
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Publication No.: US09835781B2Publication Date: 2017-12-05
- Inventor: Ji Hoon Oh , Tae Young Ahn
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin, Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2015-0049381 20150408
- Main IPC: G02B5/30
- IPC: G02B5/30 ; H01L21/033 ; H01L21/3213

Abstract:
Provided is a wire grid polarizer comprising a substrate, a plurality of conductive wire patterns formed in parallel to protrude from a top surface of the substrate and first hard mask patterns disposed on the conductive wire patterns and second hard mask patterns disposed on the first hard mask patterns, wherein a ratio of a taper angle of the second hard mask patterns to a taper angle of the first hard mask pattern is 1 or greater.
Public/Granted literature
- US20160299273A1 WIRE GRID POLARIZER AND METHOD OF FABRICATING THE SAME Public/Granted day:2016-10-13
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