Invention Grant
- Patent Title: Method and apparatus for estimating an in-focus position
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Application No.: US14570597Application Date: 2014-12-15
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Publication No.: US09835837B2Publication Date: 2017-12-05
- Inventor: Martin Philip Gouch
- Applicant: FFEI LIMITED
- Applicant Address: GB Hemel Hempstead
- Assignee: FFEI Limited
- Current Assignee: FFEI Limited
- Current Assignee Address: GB Hemel Hempstead
- Agency: Sughrue Mion, PLLC
- Priority: GB1322188.2 20131216
- Main IPC: G02B7/38
- IPC: G02B7/38 ; G02B21/00 ; G02B21/36

Abstract:
A method for estimating an in-focus position of a target using an image scanning apparatus is provided. The in-focus position is monitored at a seed location and an end location on the target and a pre-scan path is calculated between these locations. A pre-scan is then performed and a focus parameter is monitored for a plurality of locations along the pre-scan path. An imaging scan is next performed wherein the target is imaged along an image scan path and a focus parameter is monitored for a plurality of locations along said path. The focal height of the apparatus is adjusted during the imaging scan by comparing the focal parameter monitored for a current location on the image scan path with the focal parameter monitored for a similar location on the pre-scan path. The focal parameter monitored for different locations on the image scan path may also be compared.
Public/Granted literature
- US20150168701A1 METHOD AND APPARATUS FOR ESTIMATING AN IN-FOCUS POSITION Public/Granted day:2015-06-18
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