Invention Grant
- Patent Title: Gray-tone masks and the manufacturing method thereof
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Application No.: US14763235Application Date: 2015-06-30
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Publication No.: US09835939B2Publication Date: 2017-12-05
- Inventor: Zhuming Deng , Feng Zhao , Chung-Yi Chiu
- Applicant: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Shenzhen, Guangdong
- Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd
- Current Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd
- Current Assignee Address: CN Shenzhen, Guangdong
- Agent Andrew C. Cheng; Tom Abeles
- Priority: CN201510170606 20150410
- International Application: PCT/CN2015/082818 WO 20150630
- International Announcement: WO2016/161707 WO 20161013
- Main IPC: G03F1/22
- IPC: G03F1/22 ; G03F1/26 ; G03F1/38 ; G03F1/50

Abstract:
The present disclosure relates to a gray-tone mask (GTM) and the manufacturing method thereof. The GTM includes at least one first light-blocking bar and at least on second light-blocking bar. A first gap is formed between any two adjacent first light-blocking bars. The second light-blocking bar is arranged within the first gap. The first gap includes a first crack being formed between adjacent first light-blocking bar and second light-blocking bar, wherein a length of the second light-blocking bar is “a”, a width of the first crack is “b”, and a ratio of the length of the second light-blocking bar (“a”) to the width of the first crack (“b”) satisfy the relationship: 0.9
Public/Granted literature
- US20170045815A1 GRAY-TONE MASKS AND THE MANUFACTURING METHOD THEREOF Public/Granted day:2017-02-16
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