Invention Grant
- Patent Title: Roll to roll light exposure system
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Application No.: US14933896Application Date: 2015-11-05
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Publication No.: US09835951B2Publication Date: 2017-12-05
- Inventor: Jae Hyuk Chang , Sang Hyun Yun , Ki Beom Lee , Hi Kuk Lee
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR
- Agency: Innovation Counsel LLP
- Priority: KR10-2015-0007616 20150115
- Main IPC: G03B27/58
- IPC: G03B27/58 ; G03F7/20 ; G03F7/22

Abstract:
Embodiments of the present invention provide a roll-to-roll exposure system having a reference mark array and alignment scope units for precisely measuring the position and orientation of an object on a flexible multilayered circuit film. A roll-to-roll exposure system according to an exemplary embodiment of the present invention includes: a plurality of rolls configured to move a flexible multilayered circuit film having an object positioned thereon; alignment scope units positioned so as to be spaced apart from each other and proximate to the rolls; and at least one exposure unit positioned so as to be spaced proximate to the rolls and spaced apart from sides of the alignment scope units, in which one of the rolls has a reference mark array on its surface.
Public/Granted literature
- US20160209756A1 ROLL TO ROLL LIGHT EXPOSURE SYSTEM Public/Granted day:2016-07-21
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