Invention Grant
- Patent Title: Manufacturing apparatus control system and manufacturing apparatus control method
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Application No.: US14478204Application Date: 2014-09-05
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Publication No.: US09836045B2Publication Date: 2017-12-05
- Inventor: Takashi Magara
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Minato-ku
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2014-058717 20140320
- Main IPC: G05B19/418
- IPC: G05B19/418

Abstract:
According to one embodiment, a manufacturing apparatus control system includes a defect rate detector, a significant difference tester and a defect determining unit. The defect rate detector extracts a first apparatus passage history having a first defect rate. The defect rate detector detects a third defect rate by excluding a second apparatus passage history having a second defect rate from the first apparatus passage history. The significant difference tester calculates a significant difference test value. The defect determining unit extracts a third apparatus passage history based on the third defect rate and the significant difference test value.
Public/Granted literature
- US20150268664A1 MANUFACTURING APPARATUS CONTROL SYSTEM AND MANUFACTURING APPARATUS CONTROL METHOD Public/Granted day:2015-09-24
Information query
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