Aspects of the disclosed technology relate to techniques of inserting stress-enhancing filler cells for leakage reduction. Stress analysis is first performed to identify devices with large leakage current in a layout design. An optimization zone in a row of cells that contains one or more of the devices with large leakage current is then determined. Stress-enhancing filler cells are inserted into the optimization zone to replace some or all of the one or more filler cells while placement of the cells in the optimization zone is adjusted based on a leakage reduction analysis.