- Patent Title: Method for producing semiconductor device and semiconductor device
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Application No.: US15208064Application Date: 2016-07-12
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Publication No.: US09837317B2Publication Date: 2017-12-05
- Inventor: Fujio Masuoka , Hiroki Nakamura
- Applicant: Unisantis Electronics Singapore Pte. Ltd.
- Applicant Address: SG Peninsula Plaza
- Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee Address: SG Peninsula Plaza
- Agency: Brinks Gilson & Lione
- Main IPC: H01L21/82
- IPC: H01L21/82 ; H01L21/768 ; H01L21/8234 ; H01L27/088 ; H01L29/66 ; H01L29/775 ; H01L29/06 ; B82Y10/00 ; H01L29/423 ; H01L29/786 ; H01L21/265 ; H01L21/306 ; H01L21/324 ; H01L29/16

Abstract:
A method for producing a semiconductor device includes forming a first fin-shaped semiconductor layer and a second fin-shaped semiconductor layer on a substrate using a sidewall formed around a dummy pattern on the substrate. A first insulating film is formed around the first fin-shaped semiconductor layer and the second fin-shaped semiconductor layer. A first pillar-shaped semiconductor layer is formed in an upper portion of the first fin-shaped semiconductor layer, and a second pillar-shaped semiconductor layer is formed in an upper portion of the second fin-shaped semiconductor layer.
Public/Granted literature
- US20160322261A1 METHOD FOR PRODUCING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE Public/Granted day:2016-11-03
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