Invention Grant
- Patent Title: Semiconductor interconnect structure with double conductors
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Application No.: US15097033Application Date: 2016-04-12
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Publication No.: US09837350B2Publication Date: 2017-12-05
- Inventor: Benjamin D. Briggs , Takeshi Nogami , Raghuveer R. Patlolla
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/522 ; H01L23/532 ; H01L21/768

Abstract:
Embodiments are directed to a semiconductor structure having a dual-layer interconnect and a barrier layer. The interconnect structure combines a first conductive layer, a second conductive layer, and a barrier layer disposed between. The result is a low via resistance combined with improved electromigration performance. In one embodiment, the first conductive layer is copper, the second conductive layer is cobalt, and the barrier layer is tantalum nitride. A barrier layer is not used in other embodiments. Other embodiments are also disclosed.
Public/Granted literature
- US20170294381A1 SEMICONDUCTOR INTERCONNECT STRUCTURE WITH DOUBLE CONDUCTORS Public/Granted day:2017-10-12
Information query
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