Invention Grant
- Patent Title: Semiconductor device and method of forming insulating layers around semiconductor die
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Application No.: US15055264Application Date: 2016-02-26
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Publication No.: US09837375B2Publication Date: 2017-12-05
- Inventor: Satyamoorthi Chinnusamy , Kevin Simpson , Mark C. Costello
- Applicant: Semtech Corporation
- Applicant Address: US CA Camarillo
- Assignee: Semtech Corporation
- Current Assignee: Semtech Corporation
- Current Assignee Address: US CA Camarillo
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L21/56
- IPC: H01L21/56 ; H01L21/78 ; H01L23/31 ; H01L23/00

Abstract:
A semiconductor device has a semiconductor wafer including a plurality of semiconductor die and a plurality of contact pads formed over a first surface of the semiconductor wafer. A trench is formed partially through the first surface of the semiconductor wafer. An insulating material is disposed over the first surface of the semiconductor wafer and into the trench. A conductive layer is formed over the contact pads. The conductive layer can be printed to extend over the insulating material in the trench between adjacent contact pads. A portion of the semiconductor wafer opposite the first surface of the semiconductor wafer is removed to the insulating material in the trench. An insulating layer is formed over a second surface of the semiconductor wafer and side surfaces of the semiconductor wafer. The semiconductor wafer is singulated through the insulating material in the first trench to separate the semiconductor die.
Public/Granted literature
- US20170250158A1 Semiconductor Device and Method of Forming Insulating Layers Around Semiconductor Die Public/Granted day:2017-08-31
Information query
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