Invention Grant
- Patent Title: Multi-threshold voltage field effect transistor and manufacturing method thereof
-
Application No.: US14815626Application Date: 2015-07-31
-
Publication No.: US09837416B2Publication Date: 2017-12-05
- Inventor: Amey Mahadev Walke , Chi-Hsun Hsieh , Che-Min Chu , Yu-Hsuan Kuo
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L27/092 ; H01L21/8238 ; H01L29/10 ; H01L27/12 ; H01L21/8234

Abstract:
The present disclosure provides an FET structure including a transistor of a first conductive type. The transistor includes a substrate having a region of a second conductive type, a channel between source and drain, and a gate over the channel. The channel includes dopants of the first conductive type. The gate includes a work function setting layer of the second conductive type. The present disclosure also provides a method for manufacturing an FET with multi-threshold voltages scheme. The method includes exposing channels of a first transistor of a first conductive type and a first transistor of a second conductive type from a first mask, doping the channels with dopants of the first conductive type, exposing channels of a second transistor of the first conductive type and a second conductive type from a second mask, and doping the channels with dopants of the second conductive type.
Public/Granted literature
- US20170033106A1 MULTI-THRESHOLD VOLTAGE FIELD EFFECT TRANSISTOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2017-02-02
Information query
IPC分类: