Invention Grant
- Patent Title: Semiconductor memory device and method for manufacturing same
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Application No.: US14926385Application Date: 2015-10-29
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Publication No.: US09837430B2Publication Date: 2017-12-05
- Inventor: Osamu Arisumi , Toshihiko Iinuma
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L27/11582 ; H01L27/1157

Abstract:
According to one embodiment, a semiconductor memory device includes a substrate; a stacked body provided on the substrate, the stacked body including a plurality of electrode layers, a plurality of insulating layers, the plurality of insulating layers having a side surface, a plurality of first conductive films provided between the plurality of electrode layers and the plurality of insulating layers, the plurality of first conductive films having a side surface, and a blocking insulating film, the blocking insulating film including a first portion and a second portion; and a semiconductor film. The first distance between the semiconductor film and the side surface of the plurality of first conductive films is shorter than a second distance between the semiconductor film and the second portion.
Public/Granted literature
- US20170069646A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2017-03-09
Information query
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