Invention Grant
- Patent Title: Transistor having metal electrodes surrounding a semiconductor pillar body and corresponding work-function-induced source/drain regions
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Application No.: US15287102Application Date: 2016-10-06
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Publication No.: US09837503B2Publication Date: 2017-12-05
- Inventor: Fujio Masuoka , Hiroki Nakamura
- Applicant: Unisantis Electronics Singapore Pte. Ltd.
- Applicant Address: SG Peninsula Plaza
- Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee Address: SG Peninsula Plaza
- Agency: Brinks Gilson & Lione
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/78 ; H01L29/06 ; H01L29/49 ; H01L29/786 ; H01L29/16 ; H01L29/417

Abstract:
A semiconductor device includes a pillar-shaped semiconductor having an impurity concentration of 1017 cm−3 or less. A first insulator surrounds the pillar-shaped semiconductor and a first metal surrounds a portion of the first insulator at a first end of the pillar-shaped semiconductor. A second metal surrounds a portion of the first insulator at a second end of the pillar-shaped semiconductor, and a third metal surrounds a portion of the first insulator in a region between the first and second metals. The first metal and the second metal are electrically insulated from the third metal. Source/drain regions are defined in the pillar-shaped semiconductor due to a work function difference between the pillar-shaped semiconductor and the first and second metals.
Public/Granted literature
- US20170025513A1 SEMICONDUCTOR DEVICE Public/Granted day:2017-01-26
Information query
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