A method for verifying a lighting setup used for inspecting a micro defect. The method includes simulating a scene including a micro defect, light source and imaging device. A position of the light source and imaging device is then optimized to form an optimized simulated setup for viewing micro defect. A shadow calibration reference (SCR) having a simulated shadow field is then rendered in a location. Next, a physical imaging device and light source are positioned based on information from the optimized simulated setup to form an optimized physical setup. A physical SCR based on information from the SCR rendering is fabricated. Next, an image is captured of a physical SCR in a corresponding location associated with each SCR rendering. The optimized physical setup is verified if at least one shadow parameter from the SCR rendering is substantially similar to a corresponding shadow parameter in a corresponding image.