Invention Grant
- Patent Title: Support frame for pellicles
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Application No.: US15313918Application Date: 2015-05-11
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Publication No.: US09841670B2Publication Date: 2017-12-12
- Inventor: Kazuo Kohmura , Yosuke Ono , Daiki Taneichi , Yasuyuki Sato , Toshiaki Hirota , Kiyokazu Koga
- Applicant: NIPPON LIGHT METAL COMPANY, LTD.
- Applicant Address: JP
- Assignee: NIPPON LIGHT METAL COMPANY, LTD.
- Current Assignee: NIPPON LIGHT METAL COMPANY, LTD.
- Current Assignee Address: JP
- Agency: Merchant & Gould P.C.
- Priority: JP2014-107767 20140526; JP2015-024599 20150210
- International Application: PCT/JP2015/063505 WO 20150511
- International Announcement: WO2015/182362 WO 20151203
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F1/64 ; G03F1/66 ; G03F1/62

Abstract:
Provided is a support frame for pellicles which includes an aluminum alloy-made frame body with a pellicle film bonded to a front surface of the frame body, and with a glass substrate bonded to a back surface of the frame body. A front-side recessed groove extending in a circumferential direction of the frame body is formed on the front surface of the frame body, and a front-side suction hole extending from an outer peripheral surface of the frame body to an inner surface of the front-side recessed groove is formed on the frame body.
Public/Granted literature
- US20170212418A1 SUPPORT FRAME FOR PELLICLES Public/Granted day:2017-07-27
Information query
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