Invention Grant
- Patent Title: Storage container
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Application No.: US14901956Application Date: 2014-06-05
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Publication No.: US09841671B2Publication Date: 2017-12-12
- Inventor: Masahiko Gambe
- Applicant: MURATA MACHINERY, LTD.
- Applicant Address: JP Kyoto
- Assignee: MURATA MACHINERY, LTD.
- Current Assignee: MURATA MACHINERY, LTD.
- Current Assignee Address: JP Kyoto
- Agency: DLA Piper LLP (US)
- Priority: JP2013-139795 20130703
- International Application: PCT/JP2014/064980 WO 20140605
- International Announcement: WO2015/001906 WO 20150108
- Main IPC: G03F1/66
- IPC: G03F1/66 ; H01L21/673

Abstract:
A storage container in which a uniform flow velocity of the purge gas can be achieved is provided with a plurality of stages of storage units each having an accommodating region to accommodate an article. A supply portion supplies a purge gas; a duct portion communicates with other duct portions of other storage units and serves as a flow path for the purge gas supplied from the supply portion; and an introducing portion communicably connects the duct portion with the accommodating region and introduces the purge gas to the accommodating region. In the flow path for the purge gas in the duct portion, a diffusion member is arranged.
Public/Granted literature
- US20160202604A1 STORAGE CONTAINER Public/Granted day:2016-07-14
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