Invention Grant
- Patent Title: Imprint apparatus and article manufacturing method
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Application No.: US14127213Application Date: 2012-08-08
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Publication No.: US09841673B2Publication Date: 2017-12-12
- Inventor: Hirotoshi Torii , Yusuke Tanaka
- Applicant: Hirotoshi Torii , Yusuke Tanaka
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2011-175722 20110811
- International Application: PCT/JP2012/005052 WO 20120808
- International Announcement: WO2013/021641 WO 20130214
- Main IPC: B29C59/00
- IPC: B29C59/00 ; G03F7/00 ; B29C59/02 ; B82Y10/00 ; B82Y40/00

Abstract:
An imprint apparatus molds and cures an imprint material on a substrate using a mold to thereby form a pattern on the substrate. The apparatus includes a first drive mechanism configured to apply a force in a planar direction of the mold and change the planar shape of the pattern portion formed in the mold, and a second drive mechanism configured to deform the mold about an axis (for example, the Y axis) that is orthogonal to the pressing direction of the mold and the uncured resin (for example, the Z axis) and a direction of the force applied by the first drive mechanism (for example, the X axis).
Public/Granted literature
- US20140138875A1 IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD Public/Granted day:2014-05-22
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