Invention Grant
- Patent Title: System for and method of monitoring flow through mass flow controllers in real time
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Application No.: US13354988Application Date: 2012-01-20
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Publication No.: US09846074B2Publication Date: 2017-12-19
- Inventor: Junhua Ding
- Applicant: Junhua Ding
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: McDermott Will & Emery LLP
- Main IPC: G01F25/00
- IPC: G01F25/00 ; G05D7/06
Abstract:
A mass flow controller comprises: a first flow meter constructed and arranged to measured flow rate of mass through the mass flow controller; a second flow meter constructed and arranged to measure flow rate of mass through the mass flow controller; a control valve constructed and arranged so as to control the flow rate of mass through the mass flow controller in response to a control signal generated as a function of the flow rate as measured by one of the flow meters; and a system controller constructed and arranged to generate the control signal, and to provide an indication when a difference between the flow rate of mass as measured by the first flow meter and the flow rate of mass as measured by the second flow meter exceeds a threshold.
Public/Granted literature
- US20130186486A1 SYSTEM FOR AND METHOD OF MONITORING FLOW THROUGH MASS FLOW CONTROLLERS IN REAL TIME Public/Granted day:2013-07-25
Information query
