Invention Grant
- Patent Title: Support apparatus for an optical device, optical device and lithography system
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Application No.: US15156602Application Date: 2016-05-17
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Publication No.: US09846370B2Publication Date: 2017-12-19
- Inventor: Henner Baitinger , Markus Hauf
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102013224292 20131127
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B7/18 ; G02B26/08

Abstract:
A support device for an optical apparatus is disclosed. The support device includes first and second support elements. The support device also includes first and second flexure bearings. The first flexure bearing and the second flexure bearing each connect the first support element and the second support element to one another in a thermally conductive manner and hold the first support element in a manner movable in at least one first direction relative to the second support element. Spring forces generated by the first flexure bearing and the second flexure bearing partly or completely cancel one another out in the case of a movement of the first support element relative to the second support element in the first direction.
Public/Granted literature
- US20160259249A1 SUPPORT APPARATUS FOR AN OPTICAL DEVICE, OPTICAL DEVICE AND LITHOGRAPHY SYSTEM Public/Granted day:2016-09-08
Information query
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