Invention Grant
- Patent Title: Functional element, electronic device, electronic apparatus, and moving object
-
Application No.: US14606370Application Date: 2015-01-27
-
Publication No.: US09846442B2Publication Date: 2017-12-19
- Inventor: Kei Kanemoto , Makoto Furuhata
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2014-013064 20140128
- Main IPC: G05B21/00
- IPC: G05B21/00 ; G05B13/00 ; G05D15/00 ; G05D19/02

Abstract:
There is provided a functional element capable of preventing an oblique vibration due to a vibration leakage phenomenon from propagating to degrade the detection accuracy. A gyro element as the functional element includes a support body, a detection section, a drive coupling section having a first part and a second part, and a mass section connected to the drive coupling section, and connected to the support body via the drive coupling section, and the mass section performs the drive vibration in a direction along a third axis parallel to a normal line of a plane including the first axis and the second axis perpendicular to each other.
Public/Granted literature
- US09798332B2 Functional element, electronic device, electronic apparatus, and moving object Public/Granted day:2017-10-24
Information query