Various technologies related to control flow integrity checking are described herein and can be used to greatly improve software security. During static analysis, a canonical control flow graph can be built. Execution of a program can be interrupted at runtime, and the call stack can be observed to verify control flow integrity of the program using the canonical control flow graph. Attacks using stack tampering can be avoided, regardless of how the stack tampering is achieved. Non-invasive techniques can be used, making the technologies applicable in situations where source code is not available. Real-time operating system protection can be supported.