Invention Grant
- Patent Title: Method for manufacturing semiconductor device
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Application No.: US15498463Application Date: 2017-04-26
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Publication No.: US09847280B2Publication Date: 2017-12-19
- Inventor: Motoharu Haga
- Applicant: ROHM CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: ROHM CO., LTD.
- Current Assignee: ROHM CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Rabin & Berdo, P.C.
- Priority: JP2009-241550 20091020; JP2009-241551 20091020
- Main IPC: H01L23/495
- IPC: H01L23/495 ; H01L21/48 ; H01L23/00

Abstract:
A method for manufacturing a semiconductor device includes preparing a semiconductor chip having a back surface made of a Cu layer. The semiconductor chip is bonded to a die pad having a front surface made of Cu via a bonding material containing a dissimilar metal not containing Cu and Pb and a Bi-based material so that the Cu layer and the bonding material come into contact with each other. After the bonding, the die pad is then heat-treated.
Public/Granted literature
- US20170243811A1 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2017-08-24
Information query
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